High Precision Rotary Tables

Loadpoint Bearings is a leading supplier of high precision rotary tables to the dicing and electronics/semiconductor industries.

A wide range of precision rotary tables is available from 50 mm (2 in) diameter up to and including 400 mm (16 in) diameter. Tables are produced with standard or reduced heights. Standard height tables have the advantage of maximum axial, radial and tilt stiffness whereas reduced height tables have lower radial and tilt stiffness. All tables feature the low axial motion errors inherent of air bearings.

Precision rotary tables may be externally driven via belts or worm and wheel or alternatively can be fitted with an integral drive motor. The use of DC brushless torque motors with high resolution encoders can achieve angular position resolutions better than 0.1 arcsecs. Full technical support is available for drive selection and setting up.

Optional features include large diameter central through holes for coolant feed or a central vacuum feed with rotary coupling.

Loadpoint Bearings also produce high resolution air bearing rotary tables for applications in which position control is critical.
The tables are fitted with DC brushless torque motors and high resolution encoders to achieve angular position resolution better than 0.1 arc seconds.
They also have the smoothness of motion, the low motion errors and the low friction characteristic of air bearings but are built in the form of robust, self contained units.

Our Air Bearing rotary tables boast extremely high stiffness and load capability, with low motion errors below 25 nm. Made from hardened stainless steel, our high rigidity rotary tables give excellent wear and corrosion resistance, with through shaft vacuum for component holding.

Loadpoint High Resolution Rotary Table:

Axial Stiffness: 1370 N/m

Radial Stiffness: 450 N/m

Axial Load: 5000 Newtons

Motion errors: <25 nm

Speed: To 3000 RPM

Motor: Direct drive integral motor

Encoder: 0.2 arc second resolution

Size: Height 75 mm -200 mm, diameter 100 - 500 mm

Diameter: 150 - 500 mm